Description of Slide Vacuum Tube furnace with PECVD:
1. Temperature controller: 30 segment temperature controller with PID Intelligent adjustment
2. Door limit switch: Power source cut off as soon as open the door.
3. Chamber: The material used the alumina fiber material from Japan, both end of the tube have sealed by stainless steel flange with air cock, valve, pressure meter on it.
4. Heating elements: Sweden Canthal resistance wire
5, Sealing system：sealing by O type silica gel seal ring at between furnace tube and flange, which can ensure 12 hours pressure keeping.
6, Vacuum system: the vacuum degree of furnace tube can arrive at 10-3 pa, we have two vacuum pump 10-1Pa and 10-3 Pan for the option.
7. Leakage air switch: Automatically cut off the power as soon as the electricity leak or current exceed rated current.
8, Gas supplying system: This system have the mass flow meter, which can help to control the air flow rate.
9, Flange: Adopt the double ring sealing type, and the flange also have connector on it for connecting the resistive vacuum gage, KF25 bellow Tube etc.